Collective Substrate, Semiconductor Element Mount, Semiconductor Device, Imaging Device, Light Emitting Diode Component and Light Emitting Diode

ABSTRACT

A collective substrate ( 1 ) is produced by firing a ceramic green sheet and forming through-holes ( 11 ) in the resulting substrate. The through-holes ( 11 ) each have an interior surface including taper surfaces ( 11   b,    11   c ) which are tapered as having an opening size progressively decreasing from a main surface ( 21 ) and an external connection surface ( 22 ) toward a minimum size hole portion ( 11   a ). The taper surfaces ( 11   b,    11   c ) respectively form obtuse angles θ 1 , θ 2  with the main surface ( 21 ) and the external connection surface ( 22 ). A semiconductor element mount (BL) includes an insulative member ( 2 ) cut out of the collective substrate ( 1 ). An imaging device (PE 2 ) includes an imaging element (PE 1 ) mounted in a region surrounded by a frame ( 4 ) which is bonded to the main surface ( 21 ) of the insulative member ( 2 ) and closed by a cover (FL). A light emitting diode component (LE 2 ) includes a light emitting element (LE 1 ) mounted on the main surface ( 21 ) of the insulative member ( 2 ) with the minimum size hole portion ( 11   a ) of the through-hole being filled with an electrically conductive material ( 33   a ), the light emitting element being sealed with a fluorescent material and/or a protective resin (FR). A light emitting diode (LE 3 ) includes the light emitting diode component (LE 2 ) mounted in a package ( 7 ).

TECHNICAL FIELD

The present invention relates to a ceramic collective substrateconfigured to include a plurality of insulative members collectivelyarranged in the same plane, a semiconductor element mount produced byemploying an insulative member prepared by cutting the collectivesubstrate into a plurality of regions, semiconductor devices such as animaging device and a light emitting diode component each produced byemploying the semiconductor element mount, and a light emitting diodeproduced by employing the light emitting diode component.

BACKGROUND ART

With recent prevalence of digital cameras and camera-mounted mobilephones, imaging elements such as CCD imaging elements and C-MOS imagingelements have been increasingly demanded. In order to meet a demand forhigher image quality, the imaging elements tend to have a drasticallyincreased number of pixels. Particularly, with prevalence of digitalsingle lens reflex cameras, the imaging elements tend to have anincreased size. In recent years, light emitting elements have becomecapable of emitting a great amount of light or emitting white light withthe use of a fluorescent material in combination. Therefore, lightemitting diodes employing the light emitting elements are widely used asflashes for the camera-mounted mobile phones.

In order to ensure that the imaging elements, the light emittingelements and like semiconductor elements sufficiently exhibit theircapabilities for higher output, there is an increasing demand for asemiconductor element mount employing an insulative member composed of aceramic material such as AlN having a higher heat dissipatingcapability. For example, the insulative member of the semiconductorelement mount has opposite surfaces which respectively serve as a mainsurface for mounting a semiconductor element and an external connectionsurface for connection to a second component. The semiconductor elementmount includes a plurality of electrode layers provided on the mainsurface for mounting the semiconductor element, a plurality of electrodelayers provided on the external connection surface for the connection tothe second component, and electrically conductive layers orvia-conductors respectively provided in a plurality of through-holesextending through the insulative member for individually connecting theelectrode layers provided on the main surface to the electrode layersprovided on the external connection surface.

Conventionally, the semiconductor element mount is typically produced bya so-called co-firing method employing a ceramic green sheet as aprecursor material for the insulative member (see, for example, thefollowing Patent Publications 1 and 2). That is, the ceramic green sheetis formed as having a plane shape corresponding to the outer shape ofthe insulative member, and through-holes are formed at predeterminedpositions in the ceramic green sheet. In the case of the via-conductors,an electrically conductive paste to be co-fired with the ceramic greensheet for the formation of the via-conductors is filled in thethrough-holes. Then, the ceramic green sheet and the electricallyconductive paste are simultaneously fired. Thus, the semiconductorelement mount is produced.

Further, an electrically conductive paste is, for example, printed orapplied in predetermined plane shapes corresponding to the shapes of theelectrode layers on opposite surfaces of the ceramic green sheet of apredetermined plane shape later serving as the main surface and theexternal connection surface of the insulative member, and theelectrically conductive paste and the ceramic green sheet aresimultaneously fired to form underlying metal layers. Then, metal layersare formed on the underlying metal layers by plating, whereby theelectrode layers are formed on the main surface and the externalconnection surface.

Patent Publication 1: Japanese Unexamined Patent Publication JP,11-135906, A (1999) Patent Publication 2: Japanese Unexamined PatentPublication JP, 2002-232017, A DISCLOSURE OF THE INVENTION Problems tobe Solved by the Invention

However, individual production of each semiconductor element mount bythe co-firing method is lower in productivity, and requires higherproduction costs. Therefore, it is contemplated to produce a pluralityof insulative members at a time by preparing a ceramic collectivesubstrate including a plurality of insulative members collectivelyarranged in the same plane by the aforesaid co-firing method and thencutting the collective substrate into individual regions by dicing orthe like. However, a ceramic green sheet having a great area including aplurality of regions defined as the insulative members is liable to beshrunk to a great extent during the firing, and the entire ceramic greensheet is not evenly shrunk. That is, the shrinkage of the ceramic greensheet is uneven. For example, middle portions of edges of a rectangularceramic green sheet are shrunk inward to a greater extent than cornersof the rectangular sheet.

Even if through-holes are formed in the ceramic green sheet so that theregions defined as the insulative members are neatly linearly arrangedon the ceramic green sheet before the firing, the through-holes areunevenly displaced due to the shrinkage by the firing. This makes itdifficult to cut the resulting collective substrate into the individualregions by dicing or the like. In order to individually cut out theunevenly arranged regions by the dicing or the like, greater spaces areprovided between the regions in consideration of the displacement of therespective regions due to the shrinkage. In this case, however, thenumber of regions to be arranged in the single collective substrate isreduced, and a material loss is increased.

To cope with this, it is contemplated to produce the insulative membersby firing a large ceramic green sheet including a plurality of theregions defined as the insulative members to prepare a single collectivesubstrate, defining the plurality of the regions defined as theinsulative members in the collective substrate, forming through-holes inthe respective regions by a laser process or the like, and cutting thecollective substrate into the individual regions. In the aforesaidmethod, electrode layers are formed on a main surface and an externalconnection surface of the insulative member by chemical plating,electroplating or the like and, simultaneously with the formation of theelectrode layers or before or after the formation of the electrodelayers, interior surfaces of the through-holes are metallized forformation of electrically conductive layers connecting the electrodelayers on the main surface to the electrode layers on the externalconnection surface.

However, the through-holes formed by the laser process are each taperedas having a diameter progressively decreasing from a laser incident sidetoward a laser exit side. Therefore, the interior surface of thethrough-hole and a surface of the insulative member on the laser exitside meet at an acute angle, so that layers metallized by physical vapordeposition, printing, plating or the like tend to have weaker adhesionor an uneven thickness at an acute angle edge portion. Therefore, poorconnection between the electrode layers and the electrically conductivelayers is liable to occur when the electrode layers and the electricallyconductive layers are formed on the insulative member.

It is an object of the present invention to provide a collectivesubstrate which is produced by firing a ceramic green sheet and thenforming a through-hole in the resulting substrate and ensures reliableconnection between an electrically conductive layer formed in thethrough-hole and an electrode layer formed on a main surface or anexternal connection surface of the collective substrate without aconnection failure. It is another object of the present invention toprovide a semiconductor element mount produced by employing aninsulative member prepared by cutting the collective substrate intoindividual regions, semiconductor devices such as an imaging device anda light emitting diode component produced by employing the semiconductorelement mount, and a light emitting diode produced by employing thelight emitting diode component.

Means for Solving the Problems

To achieve the aforementioned objects, a collective substrate accordingto the present invention is made of a ceramic and formed integrally of aplurality of insulative members arranged in spaced relation in the sameplane of the substrate and each having opposite surfaces whichrespectively serve as a main surface for mounting a semiconductorelement and an external connection surface for connection to asecond-component, comprising: a through-hole formed at least one of apredetermined position within respective regions defined as theinsulative members, and a position across a boundary between the eachregion and a region outside the region, as extending thicknesswise ofthe insulative member, wherein the through-hole has a single minimumsize hole portion located at a position thicknesswise of the insulativemember, and an interior surface tapered such that an opening sizeprogressively decreases from openings of the through-hole in the mainsurface and in the external connection surface toward the minimum sizehole portion. The inventive collective substrate preferably has a heatconductivity of not less than 10 W/mK and a thermal expansioncoefficient of not more than 10×10⁻⁶/° C. The inventive collectivesubstrate is preferably produced by firing a planar precursor sheet andthen forming through-holes in the resulting substrate. The inventivecollective substrate preferably further comprises a semiconductorelement mounting electrode layer provided on the main surface in each ofthe regions defined as the insulative members, a second-componentconnection electrode layer provided on the external connection surfacein each of the regions, and an electrically conductive layer provided inthe through-hole for connection between the electrode layer on the mainsurface and the electrode layer on the external connection surface.

A semiconductor element mount according to the present invention isproduced by cutting the inventive collective substrate including theelectrode layers and the electrically conductive layers into theindividual regions. In the inventive semiconductor element mount, atleast an outermost surface portion of the electrode layer on theexternal connection surface is preferably composed of Au.

The inventive semiconductor element mount preferably comprises aninsulative member having a semiconductor element mount region defined ona main surface thereof, and a frame provided on the main surface of theinsulative member as surrounding the semiconductor element mount region.The insulative member and the frame preferably each have a thermalexpansion coefficient of not more than 10×10⁻⁶/° C., and a difference inthermal expansion coefficient between the frame and the insulativemember is preferably not more than 3×10⁻⁶/° C. In the inventivesemiconductor element mount, not less than 80% of the area of thesemiconductor element mount region surrounded by the frame on the mainsurface of the insulative member is covered with a metal layer at leastincluding the semiconductor element mounting electrode layer.

An imaging device according to the present invention comprises theinventive semiconductor element mount, an imaging element as asemiconductor element mounted in the region surrounded by the frame onthe main surface of the insulative member of the semiconductor elementmount, and a cover of a transparent plate bonded to an upper surface ofthe frame for sealing an inside of the frame. A semiconductor deviceaccording to the present invention comprises the inventive semiconductorelement mount, and a semiconductor element mounted on the main surfaceof the insulative member of the semiconductor element mount and sealedwith a sealant.

A semiconductor device according to the present invention is produced bymounting semiconductor elements in the regions defined as the insulativemembers on a main surface of a collective substrate which includeselectrode layers and electrically conductive layers with through-holesof the collective substrate being closed thicknesswise of the collectivesubstrate by filling minimum size hole portions of the through-holeswith an electrically conductive material for the electrically conductivelayers, then sealing the entire main surface of the collective substratemounted with the semiconductor elements with a sealant, and cutting thecollective substrate together with the sealant into the individualregions wherein an insulative member cut out of the collective substratehas a through-hole at least partly exposed to a side face of theinsulative member which intersects a main surface and an externalconnection surface of the insulative member.

A light emitting diode component according to the present inventioncomprises the inventive semiconductor device, wherein the semiconductorelement is a light emitting element and the sealant is at least one of afluorescent material and a protective resin. In the inventive lightemitting diode component, at least an outermost surface portion of theelectrode layer on the main surface of the insulative member ispreferably composed of Ag, Al or an Al alloy. A light emitting diodeaccording to the present invention comprises a package having a recess,the inventive light emitting diode component which is mounted on abottom surface of the recess of the package, and a sealing cap or a lenscomposed of a material pervious to light emitted from the light emittingdiode component and fitted in an opening of the recess for sealing therecess.

EFFECTS OF THE INVENTION

In the inventive collective substrate, the interior surface of thethrough-hole is tapered as having an opening size progressivelydecreasing from the opening in the main surface of the insulative memberand the opening in the external connection surface toward the singleminimum size hole portion of the through-hole located at the positionthicknesswise of the insulative member, so that the main surface and theexternal connection surface each meet the interior surface of thethrough-hole at an obtuse angle. Therefore, when the formation of theelectrode layers and the electrically conductive layers of the inventivecollective substrate is achieved by physical vapor deposition, printing,plating or the like, separation and uneven thickness of the layersmetallized on edges are significantly suppressed. Therefore, theelectrode layers can be assuredly connected to the electricallyconductive layers without a connection failure, whereby the reliabilityof the semiconductor device can be improved as compared with the priorart.

Where the heat conductivity of the inventive collective substrate is notless than 10 W/mK, the semiconductor element mount has a higher heatdissipating capability for higher output of the semiconductor element.Where the thermal expansion coefficient of the collective substrate isnot more than 10×10⁻⁶/° C., breakage of the element and the connectionfailure or disconnection of the electrode layers can be assuredlyprevented which may otherwise occur due to an excessive stress exertedon the semiconductor element when the semiconductor element experiencesexpansion and contraction caused by thermal history in the driving ofthe element.

Where the inventive collective substrate is produced by firing theprecursor sheet (e.g., a ceramic green sheet) and then forming thethrough-holes in the resulting substrate, uneven displacement of thethrough-holes caused by uneven shrinkage of the precursor sheet can beprevented. Hence, there is no need to provide greater spaces between therespective regions defined as the insulative members in consideration ofthe displacement due to the shrinkage. Therefore, the number of theregions to be defined on the single collective substrate can beincreased, thereby minimizing a material loss.

Where the electrode layers are formed on the main surfaces and theexternal connection surfaces of the respective insulative members of theinventive collective substrate and the electrically conductive layersare formed on the interior surfaces of the through-holes, the electrodelayers are assuredly connected to the electrically conductive layerswithout a connection failure. Therefore, with the use of the inventivesemiconductor element mount produced by cutting the inventive collectivesubstrate into the individual regions, the semiconductor element mountedon the main surface can be assuredly connected to the second componentvia the electrode layers and the electrically conductive layer without aconnection failure. Where at least the outermost surface portion of theelectrode layer on the external connection surface of the inventivesemiconductor element mount is composed of Au, the electrode layer canbe more assuredly electrically connected to an electrode layer of thesecond component by any of various known connection methods such assolder bonding and wire bonding.

Where the semiconductor element mount region is defined on the mainsurface of the insulative member of the inventive semiconductor elementmount and the frame is provided on the main surface of the insulativemember as surrounding the region, the mounted semiconductor element canbe sealed by bonding the cover on the frame after the mounting of thesemiconductor element on the region. Particularly, where thesemiconductor element is the imaging element and the cover is composedof the transparent material, the imaging element can be sealed in such astate that the imaging element is exposed to light incident through thecover.

Where the insulative member and the frame of the inventive semiconductorelement mount each have a thermal expansion coefficient of not more than10×10⁻⁶/° C. and a difference in thermal expansion coefficienttherebetween is not more than 3×10⁻⁶/° C., warp of a juncture betweenthe frame and the insulative member and a connection failure due tothermal history can be prevented by approximating the thermal expansioncoefficient of the frame to the thermal expansion coefficient of theinsulative member.

Not less than 80% of the area of the semiconductor element mount regionsurrounded by the frame on the main surface of the insulative member ofthe inventive semiconductor element mount is covered with the metallayer at least including the semiconductor element mounting electrodelayer. Where the semiconductor element is the imaging element, the metallayer functions as a light blocking layer for blocking light incidentfrom the rear side of the imaging element through the insulative memberto improve the sensitivity of the imaging element. Where thesemiconductor element is the light emitting element, the metal layerfunctions as a reflection layer to improve the light emitting efficiencyof the light emitting diode.

Since the inventive imaging device is produced by mounting the imagingelement as the semiconductor element in the region surrounded by theframe on the main surface of the insulative member of the semiconductorelement mount and bonding the cover of the transparent plate on theframe, the imaging element is sealed in such a state that the imagingelement can be exposed to light incident through the cover.

The inventive semiconductor device has a construction such that thesemiconductor element is mounted on the main surface of thesemiconductor element mount produced by cutting the collective substrateinto the individual regions and sealed with the sealant. Therefore, thesemiconductor device can be handled in the same manner as a conventionalsemiconductor element chip when the semiconductor device is mounted on amount portion of the second component (e.g., a wiring board). Further,the semiconductor device can be checked for defects before thesemiconductor device is mounted on the mount portion. In addition, thesemiconductor element is not directly touched in the mounting process,so that breakage of the element due to static electricity can besuppressed as much as possible.

Where the inventive semiconductor device is produced by mounting thesemiconductor elements on the main surface of the collective substratewith the through-holes being closed thicknesswise of the collectivesubstrate by filling the minimum size hole portions of the through-holeswith the electrically conductive material, sealing the semiconductorelements with the sealant and cutting the collective substrate togetherwith the sealant into the individual regions, the sealant is preventedfrom leaking to the opposite side through the through-holes during thesealing of the semiconductor elements. Therefore, the entire surface ofthe collective substrate mounted with the semiconductor elements can beprotected by the sealant without the need for sealing only specificregions on the surface of the collective substrate. Thus, further sizereduction of the semiconductor device can be achieved.

Where at least a part of the through-hole of the insulative member cutout of the collective substrate is exposed to the side face of theinsulative member, an exposed portion of the electrically conductivelayer formed on the interior surface of the through-hole functions as asolder fillet formation portion. Therefore, when the semiconductordevice is mounted on the mount portion of the second component bysoldering, the resulting solder fillet reinforces the externalconnection electrode layer to improve the mounting reliability.

Since the inventive light emitting diode component employs the lightemitting element as the semiconductor element and at least one of thefluorescent material and the protective resin is used as the sealant inthe inventive semiconductor device, the light emitting diode componentcan be handled in the same manner as the conventional light emittingelement chip when the light emitting diode component is mounted on amount portion of a package for the light emitting diode or on a mountportion of a board for a surface light emitting device including amultiplicity of light emitting elements arranged in a plane. Further,the light emitting element can be checked for defects and color ofemitted light before the light emitting diode component is mounted onthe mount portion. In addition, the light emitting element is notdirectly touched in the mounting process, so that breakage of theelement due to static electricity can be suppressed as much as possible.

Where at least the outermost surface portion of the electrode layer onthe main surface of the insulative member of the inventive lightemitting diode component is composed of Ag, Al or an Al alloy, lightemitted from the light emitting element, particularly, light having awavelength of not longer than 600 nm suitable for emitting white lightwith the use of a fluorescent material in combination, can be mosteffectively reflected ahead of the light emitting diode component forimprovement of the light emitting efficiency. The inventive lightemitting diode employs the inventive light emitting diode component and,therefore, can be efficiently produced without wasting expensive lightemitting diode package and the like.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an enlarged plan view illustrating a part of a collectivesubstrate to be used for preparation of an insulative member formounting an imaging element, as an exemplary collective substrateaccording to one embodiment of the present invention;

FIG. 2 is an enlarged sectional view of a through-hole of the collectivesubstrate;

FIG. 3 is an enlarged sectional view of a through-hole of an insulativemember cut out of the collective substrate;

FIG. 4 is a plan view illustrating a main surface of the insulativemember;

FIG. 5 is a plan view illustrating a semiconductor element mountproduced by bonding a frame on the main surface;

FIG. 6 is a bottom view illustrating an external connection surface ofthe insulative member;

FIG. 7 is a sectional view of an imaging device produced by mounting animaging element as a semiconductor element in an element mount region onthe main surface of the insulative member of the semiconductor elementmount and bonding a transparent cover onto the frame;

FIG. 8 is an enlarged plan view illustrating a part of a collectivesubstrate to be used for preparation of an insulative member formounting a light emitting element, as an exemplary collective substrateaccording to another embodiment of the present invention;

FIG. 9 is an enlarged sectional view of a through-hole of the collectivesubstrate;

FIG. 10 is an enlarged sectional view of a through-hole of an insulativemember cut out of the collective substrate;

FIG. 11 is a plan view illustrating a main surface of the insulativemember;

FIG. 12 is a bottom view illustrating an external connection surface ofthe insulative member;

FIG. 13 is a sectional view illustrating a light emitting diodecomponent produced by mounting a light emitting element as asemiconductor element on a main surface of an insulative member of asemiconductor element mount and sealing the light emitting element by afluorescent material and/or a protective resin as a sealant;

FIG. 14 is a sectional view illustrating a light emitting diode producedby mounting the light emitting diode component in a package;

FIG. 15 is an enlarged side view of a through-hole of a semiconductorelement mount according to further another embodiment of the presentinvention as seen in an arrow direction V in FIG. 17;

FIG. 16 is a side view illustrating a through-hole before anelectrically conductive layer is formed on an interior surface of thethrough-hole;

FIG. 17 is a plan view illustrating a main surface of the semiconductorelement mount according to the embodiment;

FIG. 18 is a bottom view illustrating an external connection surface;

FIG. 19 is an enlarged plan view of a through-hole before an insulativemember for the semiconductor element mount according to the embodimentis cut out of a collective substrate;

FIG. 20 is a sectional view taken along a line B-B in FIG. 19;

FIG. 21 is an enlarged plan view of a modification of the through-hole;and

FIG. 22 is a sectional view taken along a line B-B in FIG. 21.

EMBODIMENTS OF THE INVENTION

FIG. 1 is an enlarged plan view illustrating a part of a collectivesubstrate 1 to be used for preparation of an insulative member 2 formounting an imaging element, as an exemplary collective substrateaccording to one embodiment of the present invention. FIG. 2 is anenlarged sectional view of a through-hole 11 of the collective substrate1. FIG. 3 is an enlarged sectional view of a through-hole 11 of aninsulative member 2 cut out of the collective substrate 1. FIG. 4 is aplan view illustrating a main surface 21 of the insulative member 2.FIG. 5 is a plan view illustrating a semiconductor element mount BLproduced by bonding a frame 4 on the main surface 21. FIG. 6 is a bottomview illustrating an external connection surface 22 of the insulativemember 2. FIG. 7 is a sectional view of an imaging device PE2 producedby mounting an imaging element PE1 as a semiconductor element in anelement mount region 21 a on the main surface 21 of the insulativemember 2 of the semiconductor element mount BL and bonding a transparentcover FL onto the frame 4.

Referring to FIG. 1, the collective substrate 1 of this embodiment isentirely formed of a ceramic material as having a plate shape, andincludes a plurality of regions 1 a of a predetermined plane shape (arectangular shape in this figure) in which insulative members 2 aredefined, and a region 1 b having a constant width and provided betweenthe respective regions 1 a in a matrix shape to be later removed bydicing for defining the plurality of regions 1 a. In this figure,one-dot-and-dash lines indicate boundaries L between the regions 1 a andthe region 1 b. A plurality of through-holes 11 (eight through-holes 11in this figure) are provided respectively in the collective substrate 1as arranged along each of two parallel longitudinal edges of each of theregions 1 a across the boundary L.

The collective substrate 1 is preferably produced by firing a ceramicprecursor material (a ceramic green sheet or the like) to prepare aplanar substrate and then forming the through-holes 11 in the substrateby post processing. Thus, the formation of the through-holes 11 can beachieved at a higher positional accuracy which is not achievable by theconventional co-firing method.

Referring to FIG. 2, the through-holes 11 each have an interior surfaceincluding two taper surfaces, i.e., first and second taper surfaces 11b, 11 c. The first taper surface 11 b has a cone-like taper shape havingan opening diameter progressively decreasing from a main surface 21 ofthe insulative member 2 (on an upper side in this figure) toward asingle minimum size hole portion 11 a of a round plane shape located ata position thicknesswise of the insulative member 2, and has a roundopening in the main surface 21. The second taper surface 11 c has acone-like taper shape having an opening diameter progressivelydecreasing from an external connection surface 22 of the insulativemember 2 (on a lower side in this figure) toward the minimum size holeportion 11 a, and has a round opening in the external connection surface22.

Any of various conceivable post-processing methods may be employed forforming the through-holes 11 each having the illustrated shape in theplanar collective substrate 1 prepared by preliminary firing, but it isparticularly preferred to employ a sandblast method for the formation ofthe through-holes. Referring to FIGS. 1 and 2, round regions of thecollective substrate 1 corresponding to the openings of thethrough-holes 11 in the external connection surface 22 are exposed withthe other region protected by a resist film, and the exposed regions ofthe collective substrate 1 are selectively removed in the thicknesswisedirection by the sandblast method, whereby the second taper surfaces 11c are formed. Similarly, round regions of the collective substrate 1corresponding to the openings of the through-holes 11 in the mainsurface 21 are exposed with the other region protected by a resist film,and the exposed regions of the collective substrate 1 are selectivelyremoved in the thicknesswise direction by the sandblast method, wherebythe first taper surfaces 11 b are formed.

A feature of the sandblast method is that the size of the resulting holedecreases with the depth of the hole. Therefore, the through-holes 11are each formed as having the taper surfaces 11 b, 11 c of a cone-liketaper shape and the minimum size hole portion 11 a defined by a junctionbetween the taper surfaces 11 b and 11 c. In this method, the openingdiameter of the minimum size hole portion 11 a and the position of theminimum size hole portion 11 a with respect to the thicknesswise of theinsulative member 2 can be arbitrarily controlled by adjusting thesandblasting depth and the sandblasting diameter for the formation ofthe taper surfaces 11 b, 11 c.

Because of the through-hole 11 having the aforesaid shape, the mainsurface 21 continuous to the first taper surface 11 b forms an obtuseangle θ₁ therebetween, and the external connection surface 22 continuousto the second taper surface 11 c forms an obtuse angle θ₂ therebetween.Therefore, when electrode layers 31, 32 and an electrically conductivelayer 33 are formed as shown in FIG. 3, for example, by physical vapordeposition, printing, plating or the like, separation and uneventhickness of the layers metallized on an edge defined by the first tapersurface 11 b and the main surface 21 and on an edge defined by thesecond taper surface 11 c and the external connection surface 22 aresignificantly suppressed. Therefore, the electrode layers 31, 32 can beassuredly connected to the electrically conductive layer 33 without aconnection failure, whereby the reliability of the resulting imagingdevice PE2 can be improved.

If the taper surfaces 11 b, 11 c of the through-hole 11 met at an acuteangle, the adhesion of the electrically conductive layer 33 metallizedon the minimum size hole portion 11 a at an edge defined by the tapersurfaces 11 b, 11 c would be reduced. Therefore, the metallizedelectrically conductive layer 33 would suffer from disconnection oruneven thickness. In order to ensure that the electrically conductivelayer 33 is formed as having an even thickness with portions thereofabove and below the minimum size hole portion 11 a properly connected toeach other, the taper surfaces 11 b, 11 c preferably meet at an obtuseangle θ₃. To allow the taper surfaces 11 b, 11 c to meet at the obtuseangle θ₃, conditions for the sandblasting are controlled to adjust thetaper angles of the taper surfaces 11 b, 11 c.

The collective substrate 1 preferably has a heat conductivity of notless than 10 W/mK. If the heat conductivity is not less than 10 W/mK,the resulting semiconductor element mount BL has a higher heatdissipating capability, so that the output of the imaging element PE1can be increased. The collective substrate 1 preferably has a thermalexpansion coefficient of not more than 10×10⁻⁶/° C. If the thermalexpansion coefficient is not more than 10×10⁻⁶/° C., breakage ordisconnection of the imaging element PE1 can be prevented which mayotherwise occur due to an excessive stress exerted on the imagingelement PE1 when the element experiences expansion and contractioncaused by thermal history in the driving of the element.

Exemplary materials for the collective substrate 1 satisfying theseconditions include insulative ceramic materials such as AlN, Al₂O₃, SiC,Si₃N₄, BeO and BN, among which Al₂O₃ is preferred in terms of costs. Inconsideration of the heat dissipating capability, however, thecollective substrate 1 preferably has a heat conductivity of not lessthan 80 W/mK, particularly preferably not less than 150 W/mK within theaforesaid range. To achieve such a high heat conductivity, AlN and SiCare preferred. For reduction of a difference in thermal expansioncoefficient to the imaging element PE1, AlN and Al₂O₃ are preferred.

Therefore, if top priority is given to the heat dissipating capabilityand the like, AlN is particularly preferred among the aforesaid ceramicmaterials for the formation of the collective substrate 1. If the heatdissipating capability is not requisite, the collective substrate 1 ispreferably formed of Al₂O₃. In consideration of a trade-off between theheat dissipating capability and other properties such as mechanicalstrength of the collective substrate 1 and production costs, it isparticularly preferred that the collective substrate 1 has a heatconductivity of not more than 300 W/mK within the aforesaid range and athermal expansion coefficient of 4×10⁻⁶ to 7×10⁻⁶/° C. within theaforesaid range.

The electrode layers 31 for mounting a semiconductor element areprovided on the main surface 21 of the collective substrate 1, and theelectrode layers 32 for connection to a second component are provided onthe external connection surface 22. The electrically conductive layers33 for connection between the electrode layers 31 and 32 arerespectively provided on the interior surfaces of the through-holes 11(FIGS. 1 to 6).

Among these layers, a plurality of the electrode layers 31 on the mainsurface 21 are individually provided in association with the respectivethrough-holes 11. In the embodiment shown in the figures, the electrodelayers 31 each have a rectangular shape, and respectively extend fromthe through-holes 11 arranged along each of the two parallellongitudinal edges of the rectangular region 1 a defined as theinsulative member 2 toward the other longitudinal edge. On the otherhand, a plurality of the electrode layers 32 on the external connectionsurface 22 are also individually provided in association with therespective through-holes 11. The electrode layers 32 each have arectangular shape, and respectively extend from the through-holes 11arranged along each of the two parallel longitudinal edges of therectangular region 1 a defined as the insulative member 2 toward theother longitudinal edge. Further, the electrically conductive layers 33respectively cover the entire interior surfaces of the through-holes 11,and are each connected to the corresponding electrode layer 31 on themain surface 21 and to the corresponding electrode layer 32 on theexternal connection surface 22.

A metal layer 5 is provided on the main surface 21 with gaps g providedbetween the metal layer 5 and the respective electrode layers 31 forprevention of contact therebetween. Together with the electrode layers31, the metal layer 5 functions as a light blocking layer which covers asemiconductor element mount region 21 a of the main surface 21 to besurrounded by a frame 4. That is, the metal layer 5 blocks lightincident through the insulative member 2 from a back side of the imagingelement PE1 mounted on the region 21 a to improve the sensitivity of theimaging element PE1.

The electrode layers 31 and the metal layer 5 preferably cover not lessthan 80% of the area of the region 21 a. Thus, the electrode layers 31and the metal layer 5 sufficiently function as the light blocking layer.However, the electrode layers 31 should be spaced from each other, andthe metal layer 5 should be spaced from the electrode layers 31.Therefore, the gaps g are inevitably present between the metal layer 5and the respective electrode layers 31, making it impossible to cover100% of the area of the region 21 a or the entire region 21 with theelectrode layers 31 and the metal layer 5. In order to providesufficient gaps g between the respective electrode layers 31 and themetal layer 5 for prevention of short circuit between the electrodelayers 31, the electrode layers 31 and the metal layer 5 preferablycover not more than 95% of the area of the region 21 a. Alternatively,the electrode layers 31 may be formed as having a greater total area tocover 80 to 95% of the area of the region 21 a without the provision ofthe metal layer 5.

The electrode layers 31, 32 and the electrically conductive layers 33may be formed of any of various known metal materials and the likeexcellent in electrical conductivity. These layers may have a singlelayer structure or a multi-layer structure including two or more layers,and formed by any of various metallization methods including a wetplating method and physical vapor deposition methods such as a vacuumvapor deposition method and a sputtering method. The wet plating methodprovides a metal film having a sufficient thickness by a singletreatment step. Therefore, the electrode layers 31, 32 and theelectrically conductive layers 33 may be formed as each having a singlelayer structure, or as having a multi-layer structure, for example,including one or two underlying layers of Cu and/or Ni and a 0.1 to10-μm thick surface layer of a highly electrically conductive metal suchas Ag or Au stacked on the underlying layers.

By the physical vapor deposition method, the electrode layers 31, 32 andthe electrically conductive layers 33 are preferably formed as eachhaving a multi-layer structure including a plurality of layers havingdifferent functions and stacked one on another. For example, themulti-layer structure may be a three-layer structure including thefollowing layers stacked on the collective substrate 1 in the followingorder:

(I) an adhesion layer composed of Ti, Cr, NiCr, Ta or a compound of anyof these metals and having excellent adhesion to the collectivesubstrate 1;(II) a diffusion prevention layer composed of Pt, Pd, Cu, Ni, Mo or NiCrand functioning to prevent diffusion of a metal forming the followingsurface layer; and(III) a highly electrically conductive surface layer composed of Ag, Alor Au.The adhesion layer preferably has a thickness of about 0.01 to about 1.0μm, and the diffusion prevention layer preferably has a thickness ofabout 0.01 to about 1.5 μm. The surface layer preferably has a thicknessof about 0.1 to about 10 μm.

By employing the physical vapor deposition method and the wet platingmethod in combination, the electrode layers 31, 32 and the electricallyconductive layers 33 may be formed as each having a multi-layerstructure. The multi-layer structure may be provided, for example, byforming an adhesion layer and a diffusion prevention layer by thephysical vapor deposition method, forming an underlying layer of Cu orNi by the wet plating method, and forming a highly electricallyconductive surface layer of Ag, Al or Au by the physical vapordeposition method or the wet plating method.

Bonding pads of Au or the like may be provided on surfaces of theelectrode layers 31 on the main surface 21, for example, for improvingthe reliability of connection between terminals of the mounted imagingelement PE1 and the electrode layers 31 through bonding wires WB.Further, solder bonding layers of Au or the like may be provided onsurfaces of the electrode layers 32 on the external connection surface22, for example, for improving the reliability of surface mounting withsolder connection between the electrode layers 32 and electrode layersprovided on a board for use in a digital camera or the like.

However, where Au is used as an electrically conductive material for theformation of the electrode layers 31, 32 of the single layer structureor for the formation of the outermost layers of the electrode layers 31,32 of the multi-layer structure, the provision of the bonding pads andthe solder bonding layers may be obviated. Since the metal layer 5 andthe electrode layers 31 are formed on the same surface, the metal layer5 and the electrode layers 31 may be simultaneously formed as having thesame layer structure. However, the metal layer 5 is merely required tofunction as the light blocking layer. Therefore, even if the electrodelayers 31 are formed as having the multi-layer structure as describedabove, the metal layer 5 may be formed as having a single layerstructure including a sufficiently thick layer.

Pattern formation of the electrode layers 31, 32 and the metal layers 5on the collective substrate 1 may be achieved, for example, by forming ametal mask or a photolithographic mask and selectively metallizingexposed surface portions of the collective substrate 1 uncovered withthe mask by the wet plating method or the physical vapor deposition. Forthe formation of the electrode layers 31, 32 of the multi-layerstructure, the exposed surface portions of the insulative members 1 arerepeatedly metallized by employing different metals. When the electrodelayers 31 and the metal layers 5 are formed on the main surface 21and/or when the electrode layers 32 are formed on the externalconnection surface 22, the formation of the electrically conductivelayers 33 is achieved simultaneously with the formation of the electrodelayers 31 and/or the formation of the electrode layers 32 so as toconnect the electrically conductive layers 33 to the electrode layers 31and/or the electrode layers 32 by uncovering the openings of thethrough-holes 11 with the mask.

For production of a semiconductor element mount BL for mounting animaging element PE1 as a semiconductor element by employing thecollective substrate 1 formed with the electrode layers 31, 32, theelectrically conductive layers 33 and the metal layers 5, the region 1 bof the collective substrate 1 defined by the boundaries L is removed bydicing or the like. Thus, the remaining regions 1 a are separated fromeach other, thereby providing a plurality of insulative members 2.Thereafter, a frame 4 is bonded onto the main surface 21 of each of theresulting insulative members 2, for example, via a bonding layer B1 of aresin or a low melting point glass. Thus, the semiconductor elementmount BL is produced in which a region 21 a of the main surface 21exposed through a hole 41 of the frame 4 serves as an element mountportion for mounting the imaging element PE1 as the semiconductorelement (FIGS. 4 to 7).

Further, a plurality of semiconductor element mounts BL each including aframe 4 stacked on an insulative member 2 may be produced by preparing aframe formation collective substrate having a plurality of holes 41arranged according to a pitch of the regions 1 a of the collectivesubstrate 1 and having a frame defining region in which a plurality offrames 4 are defined, bonding the frame formation collective substrateon the main surface 21 of the collective substrate 1 formed with theelectrode layers 31, 32, the electrically conductive layers 33 and themetal layers 5 via a bonding layer B1, and removing the region 1 b ofthe collective substrate 1 together with a portion of the frameformation collective substrate overlapping with the region 1 b by dicingor the like.

For prevention of warp or deformation of the frame 4 stacked on theinsulative member 2 and for reduction of a difference in thermalexpansion coefficient between the frame 4 and the semiconductor element,the frame 4 is preferably composed of a material which has a thermalexpansion coefficient of not more than 10×10⁻⁶/° C., particularly 4×10⁻⁶to 7×10⁻⁶/° C. and differs in thermal expansion coefficient from theinsulative member 2 by not more than 3×10⁻⁶/° C., particularly not morethan 1×10⁻⁶/° C. More preferably, the difference in thermal expansioncoefficient is eliminated by employing the same material as theinsulative member 2 for the formation of the frame 4. Where theinsulative member 2 is composed of AlN, for example, the frame 4 ispreferably also composed of AlN. Where the insulative member 2 iscomposed of Al₂O₃, the frame 4 is preferably also composed of Al₂O₃.Where the semiconductor element is an imaging element, the frame 4 ispreferably composed of a material having a light blocking property forblocking unwanted light incident through the frame 4.

Referring to FIG. 7, an imaging device PE2 according to the presentinvention is produced by mounting an imaging element PE1 on the region21 a of the semiconductor element mount BL, connecting distal endportions of the electrode layers 31 exposed within the region 21 a toterminals (not shown) of the imaging element PE1 via bonding wires WB,and bonding a cover FL of a transparent material to the frame 4 via abonding layer B2 of a resin, a low melting point glass or the like. Inthe imaging device PE2, the imaging element PE1 is sealed in such astate that the imaging element PE1 can be exposed to light incidentthrough the cover FL. The respective terminals of the imaging elementPE1 are connected to electrode layers and the like provided on a boardfor a digital camera through the bonding wires WB, the electrode layers31, the electrically conductive layers 33 and the electrode layers 32.

FIG. 8 is an enlarged plan view illustrating a part of a collectivesubstrate 1 to be used for preparation of an insulative member 2 formounting a light emitting element, as an exemplary collective substrate1 according to another embodiment of the present invention. FIG. 9 is anenlarged sectional view of a through-hole 11 of the collective substrate1. FIG. 10 is an enlarged sectional view of a through-hole 11 of aninsulative member 2 cut out of the collective substrate 1. FIG. 11 is aplan view illustrating a main surface 21 of the insulative member 2.FIG. 12 is a bottom view illustrating an external connection surface 22of the insulative member 2. FIG. 13 is a sectional view illustrating alight emitting diode component LE2 produced by mounting a light emittingelement LE1 as a semiconductor element on a main surface 21 of aninsulative member 2 of a semiconductor element mount BL and sealing thelight emitting element LE1 by a fluorescent material and/or a protectiveresin FR as a sealant. FIG. 14 is a sectional view illustrating a lightemitting diode LE3 produced by mounting the light emitting diodecomponent LE2 in a package 7.

Referring to FIG. 8, the collective substrate 1 of this embodiment isalso entirely formed of a ceramic material as having a plate shape, andincludes a plurality of regions 1 a of a predetermined plane shape (arectangular shape in this figure) defined as insulative members 2, and aregion 1 b having a constant width and provided between the respectiveregions 1 a in a matrix shape to be later removed by dicing for definingthe plurality of regions 1 a. In this figure, one-dot-and-dash linesindicate boundaries L between the regions 1 a and the region 1 b. Aplurality of through-holes 11 (three through-holes 11 in this figure)are formed in the collective substrate 1 as arranged along each of twoparallel longitudinal edges of each of the regions 1 a in the vicinityof the boundary L.

The collective substrate 1 is preferably produced by firing a ceramicprecursor material (a ceramic green sheet or the like) to prepare aplanar substrate and then forming the through-holes 11 in the substrateby post processing as in the preceding embodiment. Thus, the formationof the through-holes 11 can be achieved at a high positional accuracywhich is not achievable by the conventional co-firing method. Further,electrode layers 31, 32 and electrically conductive layers 33 arepreferably formed on surfaces of the collective substrate 1 after thefiring. In this case, the electrode layers 31 and the like may be formedof Al having excellent light reflectivity, although it is difficult toform Al layers by plating on underlying layers formed of Mo, W or thelike by the co-firing method.

Referring to FIG. 9, the through-holes 11 each have an interior surfaceincluding two taper surfaces, i.e., first and second taper surfaces 11b, 11 c. The first taper surface 11 b has a cone-like taper shape havingan opening diameter progressively decreasing from the main surface 21 ofthe insulative member 2 (on an upper side in this figure) toward asingle minimum size hole portion 11 a of a round plane shape located ata position thicknesswise of the insulative member 2, and has a roundopening in the main surface 21. The second taper surface 11 c has acone-like taper shape having an opening diameter progressivelydecreasing from the external connection surface 22 of the insulativemember 2 (on a lower side in this figure) toward the minimum size holeportion 11 a, and has a round opening in the external connection surface22.

The main surface 21 continuous to the first taper surface 11 b forms anobtuse angle θ₁ therebetween, and the external connection surface 22continuous to the second taper surface 11 c forms an obtuse angle θ₂therebetween. Therefore, when the electrode layers 31, 32 and theelectrically conductive layer 33 are formed, for example, by physicalvapor deposition, printing, plating or the like, separation and uneventhickness of the layers metallized on an edge defined by the first tapersurface 11 b and the main surface 21 and on an edge defined by the firsttaper surface 11 c and the external connection surface 22 aresignificantly suppressed. Therefore, the electrode layers 31, 32 can beassuredly connected to the electrically conductive layer 33 without aconnection failure, whereby the reliability of the resulting lightemitting diode component LE2 and the resulting light emitting diode LE3can be improved.

Referring to FIG. 10, when the electrically conductive layers 33 areformed on the interior surfaces of the through-holes 11, the minimumsize hole portions 11 a are filled to be closed thicknesswise of thecollective substrate 1 by deposition of an electrically conductivematerial 33 a for the electrically conductive layers 33 before thecollective substrate is cut. When light emitting elements LE1 aremounted on the main surfaces 21 of the respective insulative members 2of the collective substrate 1 and sealed with a fluorescent materialand/or a protective resin FR as a sealant in the subsequent step asdescribed above, the fluorescent material and/or the protective resin FRare prevented from leaking to the rear surface of the collectivesubstrate 1 through the through-holes 11.

However, if the separation or uneven thickness of the electricallyconductive layers 33 each metallized on the minimum size hole portion 11a on the edge defined by the taper surfaces 11 b, 11 c of thethrough-hole 11 occurs, it will be impossible to properly fill theminimum size hole portion 11 a with the electrically conductive material33 a. In order to properly fill the minimum size hole portion 11 a withthe electrically conductive material 33 a, the taper surfaces 11 b, 11 cpreferably meet at an obtuse angle θ₃. To allow the taper surfaces 11 b,11 c to form the obtuse angle θ₃, conditions for sandblasting and thelike are controlled to adjust the taper angles of the taper surfaces 11b, 11 c.

Referring to FIGS. 8 and 9, the second taper surface 11 c of thethrough-hole 11 is located across the boundary L between the region 1 adefined as the insulative member 2 and the region 1 b defined betweenthe regions 1 a in the collective substrate 1. When the region 1 b isremoved by dicing or the like to separate the regions 1 a from eachother, portions of the electrically conductive layers 33 formed on theinterior surfaces of the second taper surfaces 11 c are exposed to sidefaces 23 of the insulative member 2 of the semiconductor element mountBL through openings 11 d as shown in FIGS. 10 to 12. Therefore, theexposed portions of the electrically conductive layers 33 function assolder fillet formation portions. When a light emitting diode componentLE2 is mounted on a second component, e.g., in a package 7 for a lightemitting diode LE3 as shown in FIG. 14 by soldering, the resultingsolder fillets reinforce the external connection electrode layers 32 toimprove the mounting reliability.

The sandblast method described above is preferably employed for formingthe through-holes 11 each having the aforesaid shape in the planarcollective substrate prepared by preliminary firing by the postprocessing. In this method, the opening diameter of the minimum sizehole portion 11 a and the position of the minimum size hole portion 11 awith respect to the thicknesswise of the insulative member 1 can bearbitrarily controlled by adjusting the sandblasting depth and thesandblasting diameter for the formation of the taper surfaces 11 b, 11c.

Referring to FIG. 9, the position of the minimum size hole portion 11 awith respect to the thicknesswise of the insulative member 2 to becontrolled in the aforesaid manner is preferably such that a distance hbetween the main surface 21 and the minimum size hole portion 11 a ismore than zero and not more than ⅔ of the thickness to of the insulativemember 2. Thus, the taper surfaces 11 b, 11 c are provided above andbelow the minimum size hole portion 11 a. Further, the first tapersurface 11 b meets the main surface 21 at the obtuse angle θ₁, and thesecond taper surface 11 c meets the external connection surface 22 atthe obtuse angle θ₂. Therefore, the electrode layers 31, 32 respectivelyformed on the main surface 21 and the external connection surface 22 canbe assuredly connected to the electrically conductive layer 33.

The portion of the electrically conductive layer 33 formed on the secondtaper surface 11 c as continuously extending from the electrode layer 32on the external connection surface 22 outside the minimum size holeportion 11 a may be allowed to have a sufficient exposed area, therebysatisfactorily functioning as the solder fillet formation portion.Further, the first and second taper surfaces 11 b, 11 c are formed fromthe opposite sides of the collective substrate 1 by the sandblast methodso as to be connected to each other, whereby the through-holes 11 can beassuredly formed without deformation. To allow the portion of theelectrically conductive layer 33 on the second taper surface 11 c tohave a sufficient exposed area functioning as the solder filletformation portion, the distance h is more preferably not more than ½ ofthe thickness to of the insulative member 2. In order to assuredly formthe through-holes 11 by the aforesaid method, the distance h is furtherpreferably about 5 μm to about 50 μm.

Referring to FIG. 9, the minimum size hole portion 11 a preferably hasan opening diameter d of not less than 10 μm. The minimum size holeportions 11 a each having an opening diameter d of not less than 10 μmcan be relatively accurately formed during the formation of thethrough-holes 11 by an ordinary processing method such as the sandblastmethod. Further, the minimum size hole portions 11 a of the respectivethrough-holes 11 can be formed as having the same opening diameter dwithout a need for another processing step. This improves theproductivity of the semiconductor element mount BL, thereby reducing thecosts.

The opening diameter d of the minimum size hole portion 11 a ispreferably not more than 200 μm. If the opening diameter d is not morethan 200 μm, the minimum size hole portions 11 a can be more efficientlyfilled with the electrically conductive material 33 a during theformation of the electrically conductive layers 33 on the interiorsurfaces of the through-holes 11. Therefore, the leak of the fluorescentmaterial and/or the protective resin FR can be more assuredly prevented.

In order to further assuredly form the minimum size hole portions 11 aof the through-holes 11 by an ordinary method such as the sandblastmethod and to further efficiently fill the minimum size hole portions 11a with the electrically conductive material 33 a during the formation ofthe electrically conductive layers 33 on the interior surfaces of thethrough-holes 11, the minimum size hole portions 11 a preferably eachhave an opening diameter d of 50 to 150 μm, more preferably 75 to 125μm.

In order to increase the heat dissipating capability of thesemiconductor element mount BL for higher output of the light emittingelement LE1, the collective substrate 1 preferably has a heatconductivity of not less than 10 W/mK, more preferably not less than 80W/mK, particularly preferably not less than 150 W/mK. In considerationof a trade-off between the heat conductivity and other properties suchas mechanical strength and production costs, the heat conductivity ofthe collective substrate 1 is preferably not more than 300 W/mK.

In order to prevent breakage and disconnection of the light emittingelement LE1 which may occur due to an excessive stress exerted on theelement LE1 when the element experiences expansion and contractioncaused by thermal history in the driving of the element, the collectivesubstrate 1 preferably has a thermal expansion coefficient of not morethan 10×10⁻⁶/° C. In consideration of a trade-off between the thermalexpansion coefficient and other properties such as mechanical strengthand production costs, the thermal expansion coefficient of thecollective substrate 1 is preferably 4×10⁻⁶ to 7×10⁻⁶/° C.

Exemplary materials for the collective substrate 1 satisfying theseconditions include insulative ceramic materials such as AlN, Al₂O₃, SiC,Si₃N₄, BeO and BN. Among these materials, AlN and SiC are particularlypreferred for achieving higher heat conductivity, and AlN and Al₂O₃ areparticularly preferred for reducing a difference in thermal expansioncoefficient between the collective substrate 1 and the light emittingelement LE1. Further, if a top priority is given to the costs, Al₂O₃ ispreferred.

Referring to the figures, the electrode layers 31 for mounting asemiconductor element are provided on the main surface 21 of thecollective substrate 1, and the electrode layers 32 for connection to asecond component are provided on the external connection surface 22.Further, the electrically conductive layers 33 for connection betweenthe electrode layers 31 and the electrode layers 32 are respectivelyprovided on the interior surfaces of the through-holes 11.

The minimum size hole portions 11 a of the through-holes 11 are filledby deposition of the electrically conductive material 33 a for theelectrically conductive layers 33, whereby the through-holes 11 areclosed with respect to the thicknesswise of the collective substrate 1before the insulative members 2 are cut out. This prevents thefluorescent material and/or the protective resin FR from leaking to theopposite side through the through-holes 11 when the light emittingelements LE1 mounted on the electrode layers 31 are sealed. The mainsurface 21 of the collective substrate 1 mounted with the light emittingelements LE1 can be entirely sealed with the fluorescent material and/orthe protective resin FR without the need for sealing only specificregions on the main surface 21. Therefore, the size of the lightemitting diode component LE2 can be further reduced.

The thickness t₁ of a portion of the electrically conductive material 33a at the minimum size hole portion 11 a as measured thicknesswise of thecollective substrate 1 is preferably 1/50 to ½ of the thickness t₀ ofthe collective substrate 1. If the thickness t₁ is not less than 1/50 ofthe thickness to of the collective substrate 1, the fluorescent materialand/or the protective resin FR are assuredly prevented from leaking tothe external connection surface 22 due to communication of the onceclosed through-holes 11 which may otherwise occur due to the weight ofthe sealant during the sealing. If the thickness t₁ is not more than ½of the thickness to of the collective substrate 1, the electricallyconductive layers 33 each have a sufficient exposed area between theminimum size hole portion 11 a and the external connection surface 22,so that the exposed area satisfactorily functions as the solder filletformation portion.

In order to increase the exposed area of the electrically conductivelayer 33 functioning as the solder fillet formation portion and toassuredly prevent the fluorescent material and/or the protective resinFR from leaking to the external connection surface 22 due to thecommunication of the once closed through-hole 11 which may otherwiseoccur due to the weight of the sealant during the sealing, the thicknesst₁ of the portion of the electrically conductive material 33 a at theminimum size hole portion 11 a as measured thicknesswise of thecollective substrate 1 is further preferably 1/20 to ⅕ of the thicknesst₀ of the collective substrate 1.

The thickness t₂ of the electrically conductive layer 33 formed on theinterior surface of the through-hole 11 is preferably 0.2 to 1.0 timethe opening diameter d of the minimum size hole portion 11 a. If thethickness t₂ is not less than 0.2 time the opening diameter d, theminimum size hole portions 11 a can be more efficiently filled with theelectrically conductive material 33 a when the electrically conductivelayers 33 are formed on the interior surfaces of the through-holes 11.Therefore, the leak of the fluorescent material and/or the protectiveresin FR can be more assuredly prevented.

Even if the thickness t₂ is more than 1.0 time the opening diameter d,it is impossible to provide a correspondingly higher effect. Further, anadditional amount of the electrically conductive material 33 a isrequired, so that the efficiency of the filling of the minimum size holeportions 11 a is reduced. Therefore, the thickness t₂ is preferably notmore than 1.0 time the opening diameter d. In order to furtherefficiently fill the minimum size hole portions 11 a with theelectrically conductive material 33 a, the thickness t₂ of theelectrically conductive layer 33 is further preferably 0.3 to 0.5 timesthe opening diameter d of the minimum size hole portion 11 a.

The regions 1 a defined as the insulative members 2 each have twosemiconductor element mounting electrode layers 31 spaced from eachother in a plane in an isolated state on the main surface 21 of thecollective substrate 1. Further, the regions 1 a defined as theinsulative members 2 each have two external connection electrode layers32 spaced from each other in a plane in an isolated state on theexternal connection surface 22 of the collective substrate 1. The twoelectrode layers 31 on the main surface 21 and the two electrode layers32 on the external connection surface 22 as opposed each other arerespectively connected via the electrically conductive layers 33respectively provided on the interior surfaces of the through-holes 11which are provided three by three along outer edges of the region 1 adefined as the insulative member 2 of the electrode layers 31, 32.

More specifically, the electrode layers 31, which each have a generallyrectangular plane shape, are each formed integrally and connected withextension electrode layers 31 b extending from one side edge 31 a of theelectrode layer 31 to peripheral portions of the openings of therespective through-holes 11 in the main surface 21 and the electricallyconductive layers 33 on the interior surfaces of the through-holes 11.Further, the electrode layers 32, which each have a generallyrectangular plane shape and partly overlapping with the openings of thethrough-holes 11 in the external connection surface 22, are integrallyformed and connected with the electrically conductive layers 33 on theinterior surfaces of the through-holes 11.

The total area of the electrode layers 32 provided on the externalconnection surface 22 is preferably not less than 30% of the area of theexternal connection surface 22. When the light emitting diode componentLE2 is mounted in a package 7 for a light emitting diode LE3 or a boardfor a surface light emitting device with the electrode layers 32 on theexternal connection surface 22 of the semiconductor element mount BLbonded to electrode layers on the package 7 or the board by soldering,sufficient heat dissipation paths can be provided between thesemiconductor element mount BL and the package 7 or the board.Therefore, the output of the light emitting diode LE3 can be increased.

In order to provide further sufficient heat dissipation paths, the totalarea of the electrode layers 32 is preferably not less than 50%, morepreferably not less than 70%, of the area of the external connectionsurface 22. In order to sufficiently isolate the two or more electrodelayers 32 from each other when the electrodes are spaced from each otherin a plane, the total area of the electrode layers 32 is preferably notmore than 90% of the area of the external connection surface 22.

The electrode layers 31, 32 and the electrically conductive layers 33may have a single layer structure or a multi-layer structure includingtwo or more layers composed of a highly electrically conductive metalmaterial as described above. Pattern formation of the electrode layers31, 32 is achieved by the same method as described above. Reflectivelayers composed of Ag, Al, an Al alloy or the like may be provided onsurfaces of the electrode layers 31 for reflecting light emitted fromthe light emitting element LE1, particularly short wavelength lighthaving a wavelength of 600 nm or shorter, at a high reflectivity. Amongthe aforesaid metal materials, Al is excellent in reflectivity for shortwavelength light having a wavelength of 450 nm or shorter, and ispreferable for improvement of the light emitting efficiency of a shortwavelength light emitting element LE1 which is employed in combinationwith a fluorescent material for emitting white light.

Where the electrode layers 31 are each formed as having a single layerstructure by using any of those metals as the electrically conductivematerial or formed as having a multi-layer structure including anoutermost layer of any of those metals, the provision of the reflectivelayer may be obviated. Further, solder bonding layers of Au or the likemay be provided on surfaces of the electrode layers 32 as describedabove. Alternatively, the electrode layers 32 may be each formed ashaving a single layer structure by using Au as the electricallyconductive material or formed as having a multi-layer structureincluding an outermost layer of Au, thereby obviating the provision ofthe solder bonding layer.

In order to produce the semiconductor element mount BL for mounting thelight emitting element LE1 as the semiconductor element and the lightemitting diode component LE2 by employing the collective substrate 1,light emitting elements LE1 are respectively mounted on the electrodelayers 31 in the regions 1 a of the collective substrate 1 and, afterthe entire surface of the resulting collective substrate 1 is sealedwith the fluorescent material and/or the protective resin FR, the region1 b of the collective substrate 1 is removed by dicing or the like.Thus, the remaining regions 1 a are separated from each other, wherebysemiconductor element mounts BL are produced. At the same time, lightemitting diode components LE2 as shown in FIG. 13 are provided. Themounting of the light emitting elements LE1 is achieved by soldering theelectrode layers 31 of the semiconductor element mounts BL to electrodelayers (not shown) of the light emitting elements LE1 via solder layersSL.

Considering that the light emitting diode components LE2 are eachmounted on a package 7 or a board by soldering in a subsequent step, anAu—Sn solder, an Au—Ge solder or an Au—Si solder having a relativelyhigh melting point is preferably used as a solder for the mounting ofthe light emitting elements LE1. The light emitting elements LE1 may bemounted on the respective semiconductor element mounts BL via Au bumpsrather than by the soldering. Alternatively, the light emitting elementsLE1 may be mounted on the respective semiconductor element mounts BLwith the use of a solder or a bonding paste, and then connected to theelectrode layers 31 by wire bonding.

Any of various known protective resins such as epoxy resins and siliconeresins may be used as the protective resin for sealing the lightemitting elements LE1. In consideration of heat resistance and UVresistance, the silicone resins are particularly preferred. Any ofvarious known fluorescent materials capable of emitting white light whenused in combination with the light emitting element LE1 which emitsshort wavelength light having a wavelength of 600 nm or shorter,particularly 450 nm or shorter, may be used as the fluorescent material.Where the fluorescent material and the protective resin are used incombination, the light emitting elements LE1 mounted on the electrodelayers 31 are preferably first sealed with the fluorescent material,which is in turn covered with the protective resin. Alternatively, amixture of the fluorescent material and the protective resin may be usedfor the sealing.

The area of the semiconductor element mount BL, i.e., the area of themain surface 21 or the external connection surface 22 of the insulativemember 2 in this embodiment, is preferably 1.1 to 4 times the area ofthe light emitting element LE1 mounted on the main surface 21 (aprojection area on the main surface 21). If the area of thesemiconductor element mount BL is more than 4 times the area of thelight emitting element LE1, it may be impossible to reduce the outersize for space saving. This makes it impossible to handle the lightemitting diode component BL2 produced by mounting the light emittingelement LE1 on the main surface 21 of the semiconductor element mount BLas a single component like the conventional light emitting element chipto incorporate the light emitting diode component BL2 in the package 7for the light emitting diode LE3 or to mount the light emitting diodecomponent BL2 on the board for the surface light emitting device.Further, the size of the semiconductor element mount BL is increased, sothat a material loss caused when the light emitting element LE1 becomesdefective is substantially the same as in the case of a conventionalpackage.

Particularly, the insulative member 2 composed of the aforesaid higherheat conductivity material is expensive, so that the area of theinsulative member 2 is preferably minimized within the aforesaid range.For elimination of the material loss, the area of the semiconductorelement mount BL is preferably not more than 3.5 times, more preferablynot more than 3.0 times the area of the light emitting element LE1within the aforesaid range.

If the area of the semiconductor element mount BL is less than 1.1 timesthe area of the light emitting element LE1, the mounting of the lightemitting element LE1 will be difficult. Further, there is a possibilitythat the side faces of the light emitting element LE1 are insufficientlysealed with the protective resin. In order to facilitate the mountingoperation and assuredly seal the light emitting element LE1 with theprotective resin and the like, the area of the semiconductor elementmount BL is preferably not less than 1.3 times, more preferably not lessthan 1.5 times the area of the light emitting element LE1 within theaforesaid range.

In order to ensure sufficient strength and minimize the volume of thesemiconductor element mount BL, the insulative member 2 preferably has athickness of 0.1 to 1 mm, more preferably 0.2 to 0.5 mm.

The surface light emitting device can be provided by mounting aplurality of light emitting diode components LE2 on the board. Further,the light emitting diode component LE2 may be used as a final product ofa light emitting diode device. For example, the light emitting diodecomponent LE2 may be mounted at a desired position of a circuit boardsuch as a printed circuit board or a liquid crystal back light componentby soldering through a reflow method thereby to be allowed to functionas a light emitting diode.

Referring to FIG. 14, the light emitting diode LE3 can be provided bymounting the aforesaid light emitting diode component LE2 on twoelectrode layers 72 on a bottom surface of a recess 7 a of the package 7and sealing an opening 7 b of the recess 7 a with a sealing cap or alens LS composed of a material pervious to light emitted from the lightemitting diode component LE2.

The mounting of the light emitting diode component LE2 is achieved bysoldering the electrode layers 32 of the semiconductor element mount BLto the electrode layers 72 of the package 7 via solder layers SL1. Atthis time, molten solder partly enters the through-holes 11 to bebrought into contact with the portions of the electrically conductivelayers 33 formed on the second taper surfaces 11 c and exposed to sidefaces 23 of the insulative member 2, thereby forming solder fillets SL2.This improves the mounting reliability.

The package 7 includes a board 70 having the electrode layers 72 on anupper surface thereof as seen in the figure, and a reflective member 71provided on the board 70 and having a hole serving as the recess 7 a.The hole of the reflective member 71 has a generally cone shape which isflared from the bottom surface toward the opening 7 b, and its interiorsurface serves as a reflection surface 71 a. The light from the lightemitting diode component LE2 is reflected on the reflection surface 71 atoward the opening 7 b, and efficiently radiated to the outside of thepackage 7 through the lens LS.

An insulative and heat-resistant substrate such as a ceramic substrateor a glass epoxy substrate is used as the board 70. The reflectivemember 71 may be entirely composed of a metal or at least the reflectionsurface 71 a of the reflective member 71 may be composed of a metal forefficient reflection of the light emitted from the light emitting diodecomponent LE2.

The through-holes 11 each shown in FIG. 9 may be entirely located withineach of the regions 1 a of the collective substrate 1. In this case, thetaper surfaces 11 c are not exposed to the side faces 23 of theinsulative member 2, so that the electrically conductive layers 33formed on the taper surfaces 11 c are not required to function as thesolder fillet formation portions. Therefore, the through-holes 11 may becompletely filled with the electrically conductive material 33 a.

FIG. 15 is an enlarged side view of a through-hole 11 of a semiconductorelement mount BL according to further another embodiment of the presentinvention as seen in an arrow direction V in FIG. 17. FIG. 16 is a sideview illustrating a through-hole 11 before an electrically conductivelayer 33 is formed on an interior surface of the through-hole 11. FIG.17 is a plane view illustrating a main surface 21 of the semiconductorelement mount BL of this embodiment. FIG. 18 is a bottom viewillustrating an external connection surface 22. FIG. 19 is an enlargedplane view of a through-hole 11 before an insulative member 2 for thesemiconductor element mount BL of this embodiment is cut out of acollective substrate 1. FIG. 20 is a sectional view taken along a lineB-B in FIG. 19.

Referring to these figures, the semiconductor element mount BL of thisembodiment has substantially the same construction as the embodimentshown in FIGS. 8 to 14 except for the shape of the through-hole 11.Referring to FIGS. 17 and 18, the semiconductor element mount BL of thisembodiment includes a rectangular insulative member 2 having oppositesurfaces which respectively serve as a main surface 21 for mounting alight emitting element and an external connection surface 22 forconnection to a second component, two electrode layers 31 provided onthe main surface 21 of the insulative member 2 for mounting the lightemitting element and spaced from each other in a plane in an isolatedstate, and two electrode layers 32 provided on the external connectionsurface 22 for connection to the second component and spaced from eachother in a plane in an isolated state.

The two electrode layers 31 on the main surface 21 of the insulativemember 2 and the two electrode layers 32 provided on the externalconnection surface 22 as opposed each other are respectively connectedvia electrically conductive layers 33 formed on interior surfaces of twothrough-holes 11 respectively provided on peripheral edges of theinsulative member 2 of the electrode layers 31, 32 as extendingthicknesswise of the insulative member 2.

More specifically, the two electrode layers 31, which each have agenerally rectangular plane shape and substantially entirely cover themain surface 21 with a constant width gap defined between the electrodelayers 31, are respectively formed integrally and connected with theelectrically conductive layers 33 on the interior surfaces of thethrough-holes 11. The electrode layers 32, which each have a generallyrectangular plane shape, are respectively formed integrally andconnected with extension electrode layers 32 b extending from side edges32 a of the electrode layers 32 to peripheral portions of openings ofthe through-holes 11 in the external connection surface 22 and theelectrically conductive layers 33 on the interior surfaces of thethrough-holes 11.

Production of the semiconductor element mount BL and a light emittingdiode component LE2 having a light emitting element LE1 mounted on themain surface 21 thereof and sealed with a fluorescent material and/or aprotective resin is achieved in the same manner as in the aforesaidembodiment by preparing a collective substrate 1 dimensioned so as toinclude a plurality of insulative members 2, defining a plurality ofregions 1 a defined as the insulative members 2 are respectively definedon the collective substrate 1 by boundaries L, forming through-holes 11at predetermined positions in the collective substrate, formingelectrode layers 31 and electrode layers 32 on opposite surfaces of thecollective substrate, forming electrically conductive layers 33 oninterior surfaces of the through-holes 11, mounting light emittingelements LE1 on the electrode layers 31, sealing the light emittingelements LE1 with a fluorescent material and/or a protective resin FR asa sealant, and cutting the resulting collective substrate into theindividual regions 1 a.

Referring to FIGS. 15, 16, 19 and 20, the through-holes 11 each have aninterior surface including two taper surfaces, i.e., first and secondtaper surfaces 11 b, 11 c. The first taper surface 11 b has a tapershape having an opening width progressively decreasing from the mainsurface 21 of the insulative member 2 (on an upper side in thesefigures) to a single minimum size hole portion 11 a of an ellipticalplane shape provided at a position thicknesswise of the insulativemember 2 as having a smaller opening width d than the other portion ofthe through-hole 11, and has an elliptical opening in the main surface21. The second taper surface 11 c has a taper shape having an openingwidth progressively decreasing from the external connection surface 22of the insulative member 2 (on a lower side in these figures) to theminimum size hole portion 11 a, and has an elliptical opening in theexternal connection surface 22.

The through-holes 11 are each formed in the collective substrate 1 asextending across two regions 1 a later serving as semiconductor elementmounts BL and defined by boundaries L and a region 1 b to be removed bydicing or the like between the regions 1 a. When the electricallyconductive layers 33 are formed on the interior surfaces of thethrough-holes 11, an electrically conductive material 33 a for theelectrically conductive layers 33 is deposited on and fill the minimumsize hole portions 11 a, whereby the through-holes 11 are closed withrespect to the thicknesswise of the collective substrate 1 as shown inFIGS. 19 and 20 before the collective substrate 1 is cut.

Therefore, when the light emitting elements LE1 are mounted on theelectrode layers 31 and sealed, the fluorescent material and/or theprotective resin FR are prevented from leaking to the opposite sidethrough the through-holes 11. For example, the main surface 21 of thecollective substrate 1 mounted with the light emitting elements LE1 canbe entirely sealed with the fluorescent material and/or the protectiveresin FR without the need for sealing only specific regions on the mainsurface 21. Therefore, the size of the light emitting diode componentLE2 can be further reduced.

When the region 1 b is removed to separate the regions 1 a from eachother by dicing or the like, portions of the electrically conductivelayers 33 formed on the second taper surfaces 11 c are exposed to sidefaces 23 of the insulative members 2 of the semiconductor element mountsBL through openings 11 d as shown in FIGS. 15 to 18. The exposedportions of the electrically conductive layers 33 function as solderfillet formation portions. Therefore, when the light emitting diodecomponent LE2 is mounted on the second component, e.g., a package 7 fora light emitting diode LE3, by soldering, the resulting solder filletsreinforce the external connection electrode layers 32, thereby improvingthe mounting reliability.

The through-holes 11 each having the illustrated shape are preferablyformed by the sandblast method. That is, elliptical regions on onesurface of the collective substrate 1 corresponding to the openings ofthe through-holes 11 in the external connection surface 22 are exposedwithout protection by a resist film, and the exposed regions of thecollective substrate 1 are selectively removed in the thicknesswisedirection by the sandblast method for formation of the second tapersurfaces 11 c. Similarly, elliptical regions on the other surface of thecollective substrate 1 corresponding to the openings of thethrough-holes 11 in the main surface 21 are exposed without protectionby a resist film, and the exposed regions of the collective substrate 1are selectively removed in the thicknesswise direction by the sandblastmethod for formation of the first taper surfaces 11 b. Since a featureof the sandblast method is that the size of the resulting hole decreaseswith the depth of the hole, the through-holes 11 are formed as having ashape shown in FIGS. 19 and 20.

The through-holes 11 preferably each have dimensions in substantiallythe same ranges as described above for the aforesaid reasons. Referringto FIGS. 15 and 16, the position of the minimum size hole portion 11 awith respect to the thicknesswise of the insulative member 2 ispreferably such that a distance h between the main surface 21 and theminimum size hole portion 11 a is more than zero and not more than ⅔ ofthe thickness to of the insulative member 1, more preferably not morethan ½ of the thickness to of the insulative member 1, further morepreferably about 5 μm to about 50 μm. The opening width d of the minimumsize hole portion 11 a is preferably 10 to 200 μm, more preferably 50 to150 μm, further more preferably 75 to 125 μm. The term “opening width d”herein means a width of the elliptical shape which includes arectangular center portion and semicircular portions respectivelyconnected to opposite edges of the center portion, the width beingmeasured perpendicularly to a center line extending through the centersof the semicircular portions.

The thickness t₁ of a portion of the electrically conductive material 33a at the minimum size hole portion 11 a as measured thicknesswise of theinsulative member 2 is preferably 1/50 to ½, more preferably 1/20 to ⅕of the thickness to of the insulative member 1. The thickness t₂ of theelectrically conductive layer 33 provided on the interior surface of thethrough-hole 11 is preferably 0.2 to 1.0 time, more preferably 0.3 to0.5 times the opening width d of the minimum size hole portion 11 a.

Portions other than the through-holes 11 preferably each have dimensionsin substantially the same ranges as described above for the aforesaidreasons. That is, the area of the main surface 21 or the externalconnection surface 22 of the insulative member 2 is preferably 1.1 to 4times, more preferably 1.3 to 3.5 times, further more preferably 1.5 to3.0 times the area of the light emitting element LE1 mounted on the mainsurface 21 (a projection area on the main surface 21). The insulativemember 2 preferably has a thickness of 0.1 to 1 mm, more preferably 0.2to 0.5 mm.

The total area of the electrode layers 32 provided on the externalconnection surface 22 is preferably not less than 30%, more preferablynot less than 50%, further more preferably not less than 70%, and notmore than 90% of the area of the external connection surface 22.

The electrode layers 31, 32 and the electrically conductive layers 33are formed of any of various known highly electrically conductive metalmaterials as having a single layer structure or a multi-layer structureincluding two or more layers by any of various metallization methodsincluding wet plating methods and physical vapor deposition methods suchas vacuum vapor deposition methods and sputtering methods. At leastsurface portions of the electrode layers 31 are preferably composed ofAg, Al, an Al alloy or the like, and at least surface portions of theelectrode layers 32 are preferably composed of Au.

The insulative member 2 is preferably composed of a ceramic materialhaving a heat conductivity of not less than 10 W/mK and a thermalexpansion coefficient of not more than 10×10⁻⁶/° C. Semiconductorelement mounts BL of this embodiment each including the ceramicinsulative member 2 are preferably produced by firing a ceramicprecursor material (a ceramic green sheet or the like) for theinsulative members 2 to prepare a planar collective substrate 1, andforming the through-holes 11, the electrode layers 31, 32 and theelectrically conductive layers 33 in/on the collective substrate 1 bypost processing.

Light emitting diode components LE2 are produced, as described above, bydefining a plurality of regions 1 a on a collective substrate 1dimensioned so as to include a plurality of insulative members 2,forming through-holes 11 at predetermined positions in the collectivesubstrate 1, forming electrode layers 31 on one surface of thecollective substrate, forming electrode layers 32 on the other surfaceof the collective substrate, forming electrically conductive layers 33on the interior surfaces of the through-holes 11, depositing anelectrically conductive material 33 a to fill minimum size hole portions11 a of the through-holes 11, mounting light emitting elements LE1 onthe electrode layers 31, sealing the light emitting elements LE1 with afluorescent material and/or a protective resin FR, and cutting theresulting collective substrate into the individual regions 1 a. Thus,the production of the light emitting diode components LE2 can beachieved simultaneously with the production of the semiconductor elementmounts BL.

A surface light emitting device can be produced by mounting a pluralityof such light emitting diode components LE2 on a board. Further, thelight emitting diode component LE2 may be used as a final product of alight emitting diode device. For example, the light emitting diodecomponent LE2 may be mounted at a desired position of a circuit boardsuch as a printed circuit board or a liquid crystal back light componentby soldering through a reflow method thereby to be allowed to functionas a light emitting diode.

Further, a light emitting diode LE3 can be provided by mounting thelight emitting diode component LE2 on two electrode layers 72 providedon a bottom surface of a recess 7 a of a package 7 as shown in FIG. 14via a solder layer SL1 by soldering, and sealing an opening 7 b of therecess 7 a with a sealing cap or a lens LS composed of a materialpervious to light emitted from the light emitting diode component LE2.At this time, molten solder partly enters the through-holes 11 to bebrought into contact with the portions of the electrically conductivelayers 33 formed on the second taper surfaces 11 c and exposed to sidefaces 23 of the insulative member 2, thereby forming solder fillets SL2.This improves the mounting reliability.

As shown in FIGS. 21 and 22, the through-holes 11 may each have aninterior surface including cone-like taper portions as shown in FIGS. 9and 10 and a taper portion as shown in FIGS. 19 and 20 in combination.That is, the interior surface of the through-hole 11 includes two firsttaper surfaces 11 b respectively provided in two adjacent regions 1 aeach later serving as a semiconductor light emitting element mount BL,and a single second taper surface 11 c extending across a region 1 bbetween the two regions 1 a and connected to the two first tapersurfaces 11 b through two minimum size hole portions 11 a respectivelyprovided in the two regions 1 a.

The two first taper surfaces 11 b each have a cone-like taper shapehaving an opening diameter progressively decreasing from a main surface21 a of the insulative member 2 (on an upper side in the Figure) to theminimum size hole portion 11 a of a round plane shape, and each have around opening in the main surface 21 in the region 1 a. The second tapersurface 11 c is tapered as having an elliptical plane shape including arectangular center portion and semicircular portions provided onopposite edges of the center portion concentrically with the two minimumsize hole portions 11 a, and having a previously defined opening widthprogressively decreasing from the external connection surface 22 of theinsulative member 2 (on a lower side in the Figure) to the two minimumsize hole portions 11 a, and has an elliptical opening in the externalconnection surface 22 across a region 1 b between the two regions 1 a.

The through-holes 11 are preferably formed by the sandblast method. Thatis, elliptical regions on one surface of the collective substrate 1corresponding to the openings of the through-holes 11 in the externalconnection surface 22 are exposed without protection by a resist film,and the exposed regions of the collective substrate 1 are selectivelyremoved in the thicknesswise direction by the sandblast method forformation of the elliptical second taper surfaces 11 c. Similarly, roundregions on the other surface of the collective substrate correspondingto the openings of the through-holes 11 in the main surface 21 areexposed without protection by a resist film, and the exposed regions ofthe collective substrate 1 are selectively removed in the thicknesswisedirection by the sandblast method for formation of the two first tapersurfaces 11 b at opposite ends of each of the elliptical second tapersurfaces 11 c. Since a feature of the sandblast method is that the sizeof the resulting hole decreases with the depth of the hole, thethrough-holes 11 are each formed as having a shape shown in FIGS. 21 and22.

When the electrically conductive layers 33 are formed on the interiorsurfaces of the through-holes 11, an electrically conductive material 33a for the electrically conductive layers 33 is deposited on and fill theminimum size hole portions 11 a, whereby the through-holes 11 are closedwith respect to the thicknesswise of the collective substrate 1 beforethe collective substrate 1 is cut. Therefore, the fluorescent materialand/or the protective resin FR are prevented from leaking to theopposite side through the through-holes 11. When the region 1 b betweenthe adjacent regions 1 a is removed to separate the regions 1 a fromeach other to provide the insulative members by dicing or the like,portions of the electrically conductive layers 33 formed on the secondtaper surfaces 11 c of the through-holes 11 are exposed to side faces 23of the insulative members 2 thereby to be allowed to function as solderfillet formation portions. The through-holes 11 and other portionspreferably each have dimensions in substantially the same ranges as inthe two preceding embodiments for the aforesaid reasons.

It should be understood that the present invention be not limited to theembodiments described above with reference to the drawings, but variousmodifications may be made without departing from the scope of thepresent invention.

1. A collective substrate made of a ceramic and formed integrally of aplurality of insulative members arranged in spaced relation in the sameplane of the substrate and each having opposite surfaces whichrespectively serve as a main surface for mounting a semiconductorelement and an external connection surface for connection to asecond-component, comprising: a through-hole formed at least one of apredetermined position within respective regions defined as theinsulative members, and a position across a boundary between the eachregion and a region outside the region, as extending thicknesswise ofthe insulative member, wherein the through-hole has a single minimumsize hole portion located at a position thicknesswise of the insulativemember, and an interior surface tapered such that an opening sizeprogressively decreases from openings of the through-hole in the mainsurface and in the external connection surface toward the minimum sizehole portion.
 2. A collective substrate as set forth in claim 1, havinga heat conductivity of not less than 10 W/mK.
 3. A collective substrateas set forth in claim 1, having a thermal expansion coefficient of notmore than 10×10⁻⁶/° C.
 4. A collective substrate as set forth in claim1, produced by firing a planar precursor sheet as a material for thecollective substrate and then forming through-holes in the resultingsubstrate.
 5. A collective substrate as set forth in claim 1, furthercomprising: a semiconductor element mounting electrode layer provided onthe main surface in each of the regions defined as the insulativemembers; a second-component connection electrode layer provided on theexternal connection surface in each of the regions; and an electricallyconductive layer provided in the through-hole for connection between theelectrode layer on the main surface and the electrode layer on theexternal connection surface.
 6. A semiconductor element mount producedby cutting a collective substrate as recited in claim 5 into individualregions.
 7. A semiconductor element mount as set forth in claim 6,wherein at least an outermost surface portion of the electrode layer onthe external connection surface is composed of Au.
 8. A semiconductorelement mount as set forth in claim 6, comprising: an insulative memberhaving a semiconductor element mount region defined on a main surfacethereof; and a frame provided on the main surface of the insulativemember as surrounding the semiconductor element mount region.
 9. Asemiconductor element mount as set forth in claim 8, wherein theinsulative member and the frame each have a thermal expansioncoefficient of not more than 10×10⁻⁶/° C., and a difference in thermalexpansion coefficient between the frame and the insulative member is notmore than 3×10⁻⁶/° C.
 10. A semiconductor element mount as set forth inclaim 8, wherein not less than 80% of the area of the semiconductorelement mount region surrounded by the frame on the main surface of theinsulative member is covered with a metal layer at least including thesemiconductor element mounting electrode layer.
 11. An imaging devicecomprising: a semiconductor element mount as recited in claim 8; animaging element as a semiconductor element mounted in the regionsurrounded by the frame on the main surface of the insulative member ofthe semiconductor element mount; and a cover of a transparent platebonded to an upper surface of the frame for sealing an inside of theframe.
 12. A semiconductor device comprising: a semiconductor elementmount as recited in claim 6; and a semiconductor element mounted on themain surface of the insulative member of the semiconductor element mountand sealed with a sealant.
 13. A semiconductor device produced bymounting semiconductor elements in the regions defined as the insulativemembers on the main surface of the collective substrate recited in claim5 with the through-holes of the collective substrate being closedthicknesswise of the collective substrate by filling the minimum sizehole portions of the through-holes with an electrically conductivematerial for the electrically conductive layers, then sealing the entiremain surface of the collective substrate mounted with the semiconductorelements with a sealant, and cutting the collective substrate togetherwith the sealant into the individual regions, wherein an insulativemember cut out of the collective substrate has a through-hole at leastpartly exposed to a side face of the insulative member which intersectsa main surface and an external connection surface of the insulativemember.
 14. A light emitting diode component comprising: a semiconductordevice as recited in claim 12, wherein the semiconductor element is alight emitting element, and the sealant is at least one of a fluorescentmaterial and a protective resin.
 15. A light emitting diode component asset forth in claim 14, wherein at least an outermost surface portion ofthe electrode layer on the main surface of the insulative member iscomposed of Ag, Al or an Al alloy.
 16. A light emitting diodecomprising: a package having a recess; a light emitting diode componentas recited in claim 14 being mounted on a bottom surface of the recessof the package; and a sealing cap or a lens composed of a materialpervious to light emitted from the light emitting diode component andfitted in an opening of the recess for sealing the recess.
 17. A lightemitting diode component comprising: a semiconductor device as recitedin claim 13, wherein the semiconductor element is a light emittingelement, and the sealant is at least one of a fluorescent material and aprotective resin.
 18. A light emitting diode component as set forth inclaim 17, wherein at least an outermost surface portion of the electrodelayer on the main surface of the insulative member is composed of Ag, Alor an Al alloy.
 19. A light emitting diode comprising: a package havinga recess; a light emitting diode component as recited in claim 17 beingmounted on a bottom surface of the recess of the package; and a sealingcap or a lens composed of a material pervious to light emitted from thelight emitting diode component and fitted in an opening of the recessfor sealing the recess.